- Company
- Semiconductor Equipment RelatedThermo-electric Modules
- Automotive Related
- Semiconductor Equipment RelatedFerrofluidic Seals (FerroSeals)
- Semiconductor Equipment RelatedCVD-SiC
- Semiconductor Equipment RelatedFine Ceramics Components
- Semiconductor Equipment RelatedMachinable Ceramics Components
- Electronic Device RelatedFerrofluid
- Semiconductor Equipment／Electronic DevicesChillers
Ferrofluidic Seals
(FerroSeals)
Magnetic Fluid Seal
Ferrofluidic Seals (FerroSeals)
Multi-Axial FerroSeals
Purge Mode Type
| Model | SFV020WC type |
|---|---|
| Reference Ultimate Pressure [Pa] | 10-6 |
| Operating Temperature Range [℃] | Room temperature to 80 |
| Gas Compatibility | Reactive gas |
| Housing Material | SUS304 |
| Shaft Material | SUS630 |
- [Features]
- This model has a gas purging mechanism built into the sealed unit to prevent process gases from leaking into the sealed part and reduce the amount of deposits generated near the sealed part, achieving a longer life.
- [Applications]
- CVD systems and furnaces generating corrosive gases and deposits
- Values in the data tables are the result of our test ,
or calculation and not guaranteed