- Company
- Semiconductor Equipment RelatedThermo-electric Modules
- Automotive Related
- Semiconductor Equipment RelatedFerrofluidic Seals (FerroSeals)
- Semiconductor Equipment RelatedCVD-SiC
- Semiconductor Equipment RelatedFine Ceramics Components
- Semiconductor Equipment RelatedMachinable Ceramics Components
- Electronic Device RelatedFerrofluid
- Semiconductor Equipment／Electronic DevicesChillers
Ferrofluidic Seals
(FerroSeals)
Magnetic Fluid Seal
Ferrofluidic Seals (FerroSeals)
Multi-Axial FerroSeals
Ultra High Vacuum Type
| Model | SCV012WC type |
|---|---|
| Reference Ultimate Pressure [Pa] | 10-7 |
| Operating Temperature Range [℃] | Room temperature to 80 |
| Gas Compatibility | Inert gas |
| Housing Material | SUS304 |
| Shaft Material | SUS630 |
- [Features]
-
- 1. UHV-resistant ferrofluid is used for high temperature resistance and low vapor pressure.
- 2. The differential pumping chamber and main chamber are separated by minuscule conductance. Leaked gases and outgases from baking are emitted to prevent the contamination of the main chamber.
- 3. The baking conditions are equivalent to that of TMP, which are relatively easy to achieve.
- 4. The differential pumping system and main pumping system can be integrated in a vacuum of around 10-7 Pa.
- 5. The sealed unit is of an integrated type, and its structure is simple with a sub pumping port, allowing for a compact design of the entire device.
- [Applications]
- Devices for UHV processes
- Values in the data tables are the result of our test ,
or calculation and not guaranteed