Silicon Parts

SiFusion Polysilicon Injectors

Better performance than quartz and SiC products

The SiFusion polysilicon injector acts as a jig in the furnace for supplying process gas to diffusion furnaces and LP-CVD processes.
Due to its high mechanical strength and no plastic deformation at temperatures up to 1350 °C, SiFusion injectors are a better alternative to current quartz and SiC.

SiFusion Injector

    Burst of sudden particles of injector is improved
  • Deformation and damage at high temperature are not caused
  • The structure according to the customer's specifications is available
  • IR permeability / thermal shadowing is reduced
  • PM cycle is lengthened