Silicon Parts

SiFusion High Tempter Anneal Polysilicon Boats

About infrared transmission

SiFusion products have many advantages over quartz and SiC products.

  • SiFusionTM has several advantages as comparedto the standard quartz and SiC offerings.
  • Optimal CTE match which reduces deposited film/interface stress during push, pull, and temperature ramps. With high temperature processing the CTE match reduces backside scratching, which can induce slip.
  • Made of ultra high purity polysilicon inside out unlike a CVD coated SiC products.
  • The boat can be used even if small chippings or scratches are made unlike SiC boat. The boat can be repaired in case the damages to the boat is too big to be used.