Silicon Parts

SiFusion Polysilicon Boats

Technology that enables high-purity and high-performance quartz and SiC boats

boat is a high-purity, high-performance replacement technology for existing quartz and SiC boats. They contribute to the reduction of particle and crystal defect slip. Removing these barriers to yield improvement makes SiFusion boats an essential tool for new IC architectures. The SiFusion product line includes boat designs for all major furnace models of vertical furnaces.