Silicon Parts

SiFusion Polysilicon Liners

Polysilicon liner does not require PM cleaning

Along with injectors and boats, SiFusion polysilicon liners are a key element in semiconductor furnaces. The liner provides a uniform path for gas flow from the inlet to the exhaust and acts as a barrier to prevent particles from the outer tube from affecting product yield.
Quartz and SiC typically require regular cleaning, whereas SiFusion polysilicon liners do not require PM cleaning.