Silicon Parts

SiFusion Polysilicon Pedestals

High purity, high performance

SiFusion polysilicon pedestals are products that hold boats during diffusion and heat treatment. Like all SiFusion products, these pedestals are high-purity, high-performance alternatives to quartz and SiC products.

About SiFusion pedestal

  • Proven performance with vertical furnaces of 150 mm, 200 mm and 300 mm
  • The number of grooves, pitch, length, etc. can be freely designed according to the customer's specifications.
  • There are no particles generated from this product.
  • No need for PM.